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Offline yanyan  
#1 Posted : Thursday, April 23, 2020 8:14:11 AM(UTC)
yanyan

Rank: Member

Groups: Registered
Joined: 12/3/2019(UTC)
Posts: 28

importance of cleaning dry vacuum pump

Keeping the dry vacuum pump clean can guarantee the performance of the vacuum pump. No matter what kind of equipment, if any pollutant enters, it will affect the normal operation of the equipment. This is the case with the vacuum pump. Even if a particle enters the key operation part of the vacuum pump, it is likely to cause damage to the vacuum pump.

Dry vacuum pump is composed of many different parts, which are all finished by various machining, such as turning, milling, planing, grinding, filing, welding, etc. In this way, the surface of parts will inevitably be stained with a lot of processing grease, sweat marks, polishing paste, flux, metal chips, oil scale and other pollutants. These pollutants are easy to volatilize in vacuum and affect the vacuum of vacuum equipment. In addition, pollutants absorb a large number of gases at atmospheric pressure. In vacuum environment, these gases will also be released. The factors controlling the vacuum of dry vacuum pump are constituted. For this reason, contaminants must be removed before parts are assembled.

During the use of dry vacuum pump, the parts will be polluted. The pollution is related to the service conditions and vacuum pump. For example, the vacuum drying system will be polluted by the evaporated materials after being used frequently; the inner wall of the vacuum coating machine will be polluted by the evaporated materials; the inner wall of the ion beam etching equipment will be polluted by the sputtered splashes of the workpiece; the filament of the electron gun in the vacuum will form a metal film on the nearby surface due to the high temperature evaporation; the gauge filament will evaporate under the high temperature to make the ceramic insulator shape Film forming, damage insulation strength, affect the accuracy of measurement. The mechanical pump oil and diffusion pump oil in the vacuum system are more pollution sources. After the equipment works for a long time, obvious oil film will be formed inside the equipment. These pollutants will also affect the performance of the equipment, and should be removed at any time.

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